300nm Pitch High Resolution 2D Calibration Standard for SEM Fluid TappingMode Chemical Mapping: EDS

Chemical Mapping: EDS

Has two dots on one side for easy identification

Period: 292nm pitch nominal

NanoScope IV

300nm Pitch High Resolution 2D Calibration Standard for SEM Fluid TappingMode Chemical Mapping: EDSDESCRIPTION 300nm 2D SEM, Auger and FIB Reference Standard, Certified, Non traceable, Unmounted or Mounted Period: 300nm pitch nominal, two dimensional array accurate to 1nm. Calibration certificate will give the actual pitch of the standard. Surface Structure: Aluminum bumps on Silicon, 4x3mm die: Bump height (about 50nm) and width (about 150nm) not calibrated. Usability: The calibrated pattern covers the entire chip. There is sufficient usable area